EXACTUS instruments offer a complete temperature measurement system in each pyrometer. State-of-the-art technology allows for custom-tailored integration to specific customer applications. EXACTUS offers:
In addition, the entire product line features a user-friendly design. Features that facilitate use include:
EXACTUS technology delivers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. In addition, the instruments' high speed and high resolution provides better control and noise suppression, which results in better monitoring of wafer temperature and improved process results.
While designed for exacting semiconductor applications, EXACTUS optical temperature sensors may be suitable for a wide range of applications in other industries. Ultra-sensitive electronics, precision optics, and the ability to measure low temperatures using short wavelengths allows for tighter process control, fewer emissivity errors, and improved overall performance. Applications that may be ideally suited for EXACTUS pyrometers include: