EXACTUS® Optical Temperature Sensors
A leader in precious-metal thermocouples for more than 30 years, BASF more recently applied its technological expertise to optical-based temperature measurement. Designed primarily for OEM wafer-temperature measurement applications, the EXACTUS® optical temperature sensors provide significant performance advantages in non-contact temperature measurement. Numerous pending patents cover these breakthroughs which result in industry-leading performance for accuracy, repeatability, and stability. Our performance advantage allows us to successfully measure processes in many applications which had been impossible.
EXACTUS instruments offer a complete temperature measurement system in each pyrometer. State-of-the-art technology allows for custom-tailored integration to specific customer applications. EXACTUS offers:
- Low-temperature measurements (25°C and higher) using short wavelengths
- Measurement of single crystal silicon down to 200°C using 900nm IR radiation
- High precision with resolution up to 0.001°C and accuracy of ±1.5°C
- Speeds up to 1,000 readings per second
- Broad dynamic range at any given wavelength
In addition, the entire product line features a user-friendly design. Features that facilitate use include:
- Readily configurable electronics module
- Flexible design
- Customizable hardware, software, optics, and electronics modules
- RS232, RS485/422, and Analog output from pyrometers
- Sophisticated Windows-based graphical interface
Semiconductor Process Control Advantage
EXACTUS technology delivers numerous advantages in controlling wafer-to-wafer uniformity in both temperature and film thickness. The highly sensitive electronics and advanced optics mean shorter wavelength detectors can be used to measure radiant energy. This decreases errors from both wafer transmission and emissivity. In addition, the instruments' high speed and high resolution provides better control and noise suppression, which results in better monitoring of wafer temperature and improved process results.
While designed for exacting semiconductor applications, EXACTUS optical temperature sensors may be suitable for a wide range of applications in other industries. Ultra-sensitive electronics, precision optics, and the ability to measure low temperatures using short wavelengths allows for tighter process control, fewer emissivity errors, and improved overall performance. Applications that may be ideally suited for EXACTUS pyrometers include:
- Container glass
- Glass fiber pulling
- Plastics welding
- Industrial heating
- Laser and ultrasound medical technologies
